Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate
A Standard patent application filed on 10 March 2004 credited to Kiyoku, Hiroyuki
;
Kozaki, Tokuya
;
Chocho, Kazuyuki
;
Maegawa, Hitoshi
Details
Application number :
2004201000
Application type :
Standard
Application status :
SEALED
Under opposition :
No
Proceeding type :
Invention title :
Nitride semiconductor substrate and method for manufacturing the same, and nitride semiconductor device using nitride semiconductor substrate