Composition and method used for chemical mechanical planarization of metals
A Standard patent application filed on 29 December 2003 credited to Tamboli, Dnyanesh ; Hymes, Stephen W. ; Chang, Song Y. ; Evans, Mark

Details

Application number :

2003303677  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Composition and method used for chemical mechanical planarization of metals  

Inventor :

Tamboli, Dnyanesh ; Hymes, Stephen W. ; Chang, Song Y. ; Evans, Mark  

Agent name :

 

Address for service :

 

Filing date :

29 December 2003  

Associated companies :

 

Applicant name :

AIR PRODUCTS AND CHEMICALS, INC.  

Applicant address :

7201 Hamilton Boulevard, Allentown, PA 18195  

Old name :

 

Original Source :

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