Method of determining properties of patterned thin film metal structures using transient thermal response
A Standard patent application filed on 10 December 2003 credited to Gostein, Michael
;
Maznev, Alexei
Details
Application number :
2003302975
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of determining properties of patterned thin film metal structures using transient thermal response