Gas discharge lamp for euv radiation
A Standard patent application filed on 28 November 2003 credited to Derra, Guenther Hans ; Jonkers, Jeroen ; Neff, Willi ; Bergmann, Klaus ; Pankert, Joseph Robert Rene

Details

Application number :

2003302551  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas discharge lamp for euv radiation  

Inventor :

Derra, Guenther Hans ; Jonkers, Jeroen ; Neff, Willi ; Bergmann, Klaus ; Pankert, Joseph Robert Rene  

Agent name :

 

Address for service :

 

Filing date :

28 November 2003  

Associated companies :

 

Applicant name :

KONINKLIJKE PHILIPS ELECTRONICS N.V.  

Applicant address :

Groenewoudseweg 1, NL-5621 BA Eindhoven  

Old name :

 

Original Source :

Go