Apparatus and process for sensing fluoro species in semiconductor processing systems
A Standard patent application filed on 15 October 2003 credited to Dimeo, Frank
;
Chen, Ing-Shin
;
Welch, James
;
Roeder, Jeffrey F.
;
Baum, Thomas H.
;
King, Mackenzie E.
;
Stawasz, Michele
;
Chen, Philip S.H.
;
Neuner, Jeffrey W.
Details
Application number :
2003301333
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Apparatus and process for sensing fluoro species in semiconductor processing systems
Inventor :
Dimeo, Frank
;
Chen, Ing-Shin
;
Welch, James
;
Roeder, Jeffrey F.
;
Baum, Thomas H.
;
King, Mackenzie E.
;
Stawasz, Michele
;
Chen, Philip S.H.
;
Neuner, Jeffrey W.
Agent name :
Address for service :
Filing date :
15 October 2003
Associated companies :
Applicant name :
ADVANCED TECHNOLOGY MATERIALS, INC.
Applicant address :
William F. Ryann, 7 Commerce Drive, Danbury, CT 06810