Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency
A Standard patent application filed on 23 December 2003 credited to Kuthi, Andras ; Boyd, John ; Thie, William ; Knop, Robert ; Anderson, Thomas W. ; Smith, Michael G.R.

Details

Application number :

2003299889  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Improved megasonic cleaning efficiency using auto- tuning of an rf generator at constant maximum efficiency  

Inventor :

Kuthi, Andras ; Boyd, John ; Thie, William ; Knop, Robert ; Anderson, Thomas W. ; Smith, Michael G.R.  

Agent name :

 

Address for service :

 

Filing date :

23 December 2003  

Associated companies :

 

Applicant name :

LAM RESEARCH CORPORATION  

Applicant address :

4650 Cushing Parkway, Fremont, CA 94538  

Old name :

 

Original Source :

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