Temperature compensated microelectromechanical structures and methods of compensating the effects of ambient temperature variations
A Standard patent application filed on 21 February 2000 credited to Hill, Edward
;
Mahadevan, Ramaswamy
;
Wood, Robert L.
Details
Application number :
37029
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Temperature compensated microelectromechanical structures and methods of compensating the effects of ambient temperature variations
Inventor :
Hill, Edward
;
Mahadevan, Ramaswamy
;
Wood, Robert L.