Composition for forming silicon7aluminum film, silicon7aluminum film and method for forming the same
A Standard patent application filed on 24 December 2003 credited to Matsuki, Yasuo
;
Yokoyama, Yasuaki
Details
Application number :
2003292754
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Composition for forming silicon7aluminum film, silicon7aluminum film and method for forming the same