Compound semiconductor epitaxial substrate and method for manufacturing same
A Standard patent application filed on 19 December 2003 credited to Inoue, Takayuki
;
Nakano, Tsuyoshi
;
Osada, Takenori
Details
Application number :
2003289473
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Compound semiconductor epitaxial substrate and method for manufacturing same