Light-emitting device, manufacturing apparatus, film-forming method, and cleaning method
A Standard patent application filed on 05 December 2003 credited to Yamazaki, Shunpei

Details

Application number :
2003289212  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Light-emitting device, manufacturing apparatus, film-forming method, and cleaning method  
Inventor :
Yamazaki, Shunpei  
Agent name :
 
Address for service :
 
Filing date :
05 December 2003  
Associated companies :
 
Applicant name :
SEMICONDUCTOR ENERGY LABORATORY CO., LTD.  
Applicant address :
398, Hase, Atsugi-shi, Kanagawa 243-0036  
Old name :
 
Original Source :
Go  

Same Inventor