Micro electromechanical systems for delivering high purity fluids in a chemical delivery system
A Standard patent application filed on 19 December 2003 credited to Znamensky, Dmitry ; Zdunek, Alan D.

Details

Application number :

2003288636  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Micro electromechanical systems for delivering high purity fluids in a chemical delivery system  

Inventor :

Znamensky, Dmitry ; Zdunek, Alan D.  

Agent name :

 

Address for service :

 

Filing date :

19 December 2003  

Associated companies :

 

Applicant name :

L'AIR LIQUIDE - SOCIETE ANONYME A DIRECTOIRE ET CO  

Applicant address :

75 Quai d'Orsay, F-75321 Paris Cedex 07  

Old name :

 

Original Source :

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