Method for producing high-purity silicon tetrafluoride
A Standard patent application filed on 01 October 2003 credited to Karelin, Alexandr Ivanovich
;
Karelin, Vladimir Alexandrovich
;
Abubekerov, Ravil Abdurachimovich
;
Domashev, Evgenij Dmitrievich
Details
Application number :
2003284862
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for producing high-purity silicon tetrafluoride
Inventor :
Karelin, Alexandr Ivanovich
;
Karelin, Vladimir Alexandrovich
;
Abubekerov, Ravil Abdurachimovich
;
Domashev, Evgenij Dmitrievich