Planarizing gate material to improve gate critical dimension in semiconductor devices
A Standard patent application filed on 14 October 2003 credited to Yu, Bin
;
Ahmed, Shibly S.
;
Wang, Haihong
;
Tabery, Cyrus E.
Details
Application number :
2003282842
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Planarizing gate material to improve gate critical dimension in semiconductor devices
Inventor :
Yu, Bin
;
Ahmed, Shibly S.
;
Wang, Haihong
;
Tabery, Cyrus E.
Agent name :
Address for service :
Filing date :
14 October 2003
Associated companies :
Applicant name :
ADVANCED MICRO DEVICES, INC.
Applicant address :
One AMD Place, Mail Stop 68, P.O. Box 3453, Sunnyvale, CA 94088-3453