Thin film forming apparatus and thin film forming method and thin film forming system
A Standard patent application filed on 15 October 2003 credited to Ueda, Masashi ; Takagi, Tomoko ; Ito, Norikazu

Details

Application number :
2003280561  
Application type :
Standard  
Application status :
SEALED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Thin film forming apparatus and thin film forming method and thin film forming system  
Inventor :
Ueda, Masashi ; Takagi, Tomoko ; Ito, Norikazu  
Agent name :
Phillips Ormonde Fitzpatrick  
Address for service :
367 Collins Street Melbourne VIC 3000 Australia  
Filing date :
15 October 2003  
Associated companies :
 
Applicant name :
Ishikawajima-Harima Heavy Industries Co Ltd  
Applicant address :
2-1, Otemachi 2-chome Chiyoda-ku Tokyo Japan  
Old name :
 
Original Source :
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Same Inventor