Method of determining optical properties and projection exposure system comprising a wave front detection system
A Standard patent application filed on 26 September 2003 credited to Sakowski, Harald ; Schriever, Martin ; Emer, Wolfgang ; Wegmann, Ulrich ; Lauer, Steffen

Details

Application number :

2003273925  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of determining optical properties and projection exposure system comprising a wave front detection system  

Inventor :

Sakowski, Harald ; Schriever, Martin ; Emer, Wolfgang ; Wegmann, Ulrich ; Lauer, Steffen  

Agent name :

 

Address for service :

 

Filing date :

26 September 2003  

Associated companies :

 

Applicant name :

CARL ZEISS SMT AG  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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