Details
- Application number :
- 2003272655
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Load lock vacuum conductance limiting aperture
- Inventor :
- Evans, Morgan D.
- Agent name :
-
- Address for service :
-
- Filing date :
- 24 September 2003
- Associated companies :
-
- Applicant name :
- VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
- Applicant address :
- 35 Dory Road, Gloucester, MA 01930
- Old name :
-
- Original Source :
- Go