Quartz-based nanoresonators and method of fabricating same
A Standard patent application filed on 25 April 2003 credited to Chang, David T
;
Kubena, Randall L
;
Kim, Jinsoo
Details
Application number :
2003272195
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Quartz-based nanoresonators and method of fabricating same