Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block
A Standard patent application filed on 08 October 2003 credited to Stevens, Robert
;
Harpin, Arnold
Details
Application number :
2003271921
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Fibre optic based semiconductor micro sensors for sensing pressure or temperature, fabrication methods of said sensors, and a method of securing an optical fibre to a silicon block
Inventor :
Stevens, Robert
;
Harpin, Arnold
Agent name :
Address for service :
Filing date :
08 October 2003
Associated companies :
Applicant name :
COUNCIL FOR THE CENTRAL LABORATORY OF THE RESEARCH COUNCILS