Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm
A Standard patent application filed on 08 May 2003 credited to Zibold, Axel ; Pauschinger, Dieter ; Mann, Hans-Jurgen ; Wedowski, Marco ; Reinecke, Wolfgang ; Dinger, Udo ; Ulrich, Wilhelm ; Harnisch, Wolfgang ; Engel, Thomas

Details

Application number :

2003268097  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Reflective x-ray microscope and inspection system for examining objects with wavelengths ofd 100nm  

Inventor :

Zibold, Axel ; Pauschinger, Dieter ; Mann, Hans-Jurgen ; Wedowski, Marco ; Reinecke, Wolfgang ; Dinger, Udo ; Ulrich, Wilhelm ; Harnisch, Wolfgang ; Engel, Thomas  

Agent name :

 

Address for service :

 

Filing date :

08 May 2003  

Associated companies :

 

Applicant name :

Carl Zeiss SMS GmbH  

Applicant address :

Carl-Zeiss-Strasse 22, 73447 Oberkochen  

Old name :

 

Original Source :

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