Details
- Application number :
- 2003266662
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Aligning method and aligning device in proximity exposure
- Inventor :
- Miyatake, Tsutomu
- Agent name :
-
- Address for service :
-
- Filing date :
- 26 September 2003
- Associated companies :
-
- Applicant name :
- SUMITOMO HEAVY INDUSTRIES, LTD.
- Applicant address :
- 5-9-11, Kita-shinagawa, Shinagawa-ku, Tokyo 141-0001
- Old name :
-
- Original Source :
- Go