Member for plasma etching device and method for manufacture thereof
A Standard patent application filed on 16 September 2003 credited to Inaki, Kyoichi ; Araki, Itsuo

Details

Application number :

2003266517  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Member for plasma etching device and method for manufacture thereof  

Inventor :

Inaki, Kyoichi ; Araki, Itsuo  

Agent name :

 

Address for service :

 

Filing date :

16 September 2003  

Associated companies :

 

Applicant name :

SHIN-ETSU QUARTZ PRODUCTS CO., LTD.  

Applicant address :

22-2, Nishi-Shinjuku 1-chome, Shinjuku-ku, Tokyo 160-0023  

Old name :

 

Original Source :

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