High-k dielectric film, method of forming the same and related semiconductor device
A Standard patent application filed on 30 July 2003 credited to Lee, Kilho
;
Lim, Chan
Details
Application number :
2003266410
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
High-k dielectric film, method of forming the same and related semiconductor device