Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes
A Standard patent application filed on 18 August 2003 credited to Bryan, Steven Rex ; Jesse, D. Wolfe

Details

Application number :

2003265503  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Process and apparatus for pulsed dc magnetron reactive sputtering of thin film coatings on large substrates using smaller sputter cathodes  

Inventor :

Bryan, Steven Rex ; Jesse, D. Wolfe  

Agent name :

 

Address for service :

 

Filing date :

18 August 2003  

Associated companies :

 

Applicant name :

THE REGENTS OF THE UNIVERSITY OF CALIFORNIA  

Applicant address :

1111 Franklin Street, Oakland, CA 94607-5200  

Old name :

 

Original Source :

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