Electron beam irradiation device, electron beam irradiation method, disc-like body manufacturing apparatus, and disc-like body manufacturing method
A Standard patent application filed on 18 September 2003 credited to Tanaka, Kazushi
;
Yoneyama, Kenji
;
Kaneko, Yukio
;
Umega, Takeshi
;
Usami, Mamoru
Details
Application number :
2003264485
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Electron beam irradiation device, electron beam irradiation method, disc-like body manufacturing apparatus, and disc-like body manufacturing method