Rotation drive device and rotation drive method
A Standard patent application filed on 12 September 2003 credited to Sato, Hideaki

Details

Application number :

2003264426  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Rotation drive device and rotation drive method  

Inventor :

Sato, Hideaki  

Agent name :

 

Address for service :

 

Filing date :

12 September 2003  

Associated companies :

 

Applicant name :

TOKYO ELECTRON LIMITED  

Applicant address :

3-6, Akasaka 5-chome, Minato-ku, Tokyo 107-8481  

Old name :

 

Original Source :

Go  

Related Patents

• Optical switch employing biased rotatable comb drive devices and...

Same Inventor

• N-hydroxyformamidine derivative
• Pyrazine derivatives
• Method of predicting processed results and processing device
• Wind power generator
• TELEPHONE ANSWERING APPARATUS