Process for producing high-purity silicon and apparatus
A Standard patent application filed on 11 September 2003 credited to Fukuoka, Hiroshi
;
Shimamune, Takayuki
;
Yoshikawa, Tadashi
;
Ishizawa, Nobuo
Details
Application number :
2003264408
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Process for producing high-purity silicon and apparatus