Gas tube end cap for a microwave plasma generator
A Standard patent application filed on 29 August 2003 credited to Wang, Albert

Details

Application number :

2003263048  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Gas tube end cap for a microwave plasma generator  

Inventor :

Wang, Albert  

Agent name :

 

Address for service :

 

Filing date :

29 August 2003  

Associated companies :

 

Applicant name :

AXCELIS TECHNOLOGIES, INC.  

Applicant address :

55 Cherry Hill Drive, Beverly, MA 01915-1053  

Old name :

 

Original Source :

Go  

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