A polishing pad support that improves polishing performance and longevity
A Standard patent application filed on 02 September 2003 credited to Obeng, Yaw S. ; Thomas, Peter A.

Details

Application number :

2003263006  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

A polishing pad support that improves polishing performance and longevity  

Inventor :

Obeng, Yaw S. ; Thomas, Peter A.  

Agent name :

 

Address for service :

 

Filing date :

02 September 2003  

Associated companies :

 

Applicant name :

PSILOQUEST, INC.  

Applicant address :

Suite 650, 6901 TPC Boulevard, Orlando, FL 32822  

Old name :

 

Original Source :

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