Position determining device, position determining method and exposure device, exposure method and alignment determining device, and alignment determining method
A Standard patent application filed on 23 March 2000 credited to Nakajima, Shin-ichi

Details

Application number :

33255  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Position determining device, position determining method and exposure device, exposure method and alignment determining device, and alignment determining method  

Inventor :

Nakajima, Shin-ichi  

Agent name :

 

Address for service :

 

Filing date :

23 March 2000  

Associated companies :

 

Applicant name :

Nikon Corporation  

Applicant address :

 

Old name :

 

Original Source :

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