Methods and apparatus for pressure compensation in a mass flow controller
A Standard patent application filed on 17 July 2003 credited to Wang, Chiun ; Saggio, Joseph A. Jr. ; Lull, John Michael

Details

Application number :

2003253991  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Methods and apparatus for pressure compensation in a mass flow controller  

Inventor :

Wang, Chiun ; Saggio, Joseph A. Jr. ; Lull, John Michael  

Agent name :

 

Address for service :

 

Filing date :

17 July 2003  

Associated companies :

 

Applicant name :

CELERITY GROUP, INC.  

Applicant address :

2805 Mission College Blvd., Santa Clara, CA 95054  

Old name :

 

Original Source :

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