Scanning device including an objective system with a lens protection device
A Standard patent application filed on 04 August 2003 credited to Hendriks, Bernardus H. W.
;
Schleipen, Johannes J. H. B.
;
Mori, Nobuyoshi
;
Van As, Marco A. J.
;
Yagi, Katsuya
Details
Application number :
2003250432
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Scanning device including an objective system with a lens protection device
Inventor :
Hendriks, Bernardus H. W.
;
Schleipen, Johannes J. H. B.
;
Mori, Nobuyoshi
;
Van As, Marco A. J.
;
Yagi, Katsuya