Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules
A Standard patent application filed on 10 July 2003 credited to Butcher, Dana G.
;
Gates, Richard B.
;
Pelrin, James
;
Hudson, Douglas E.
Details
Application number :
2003248918
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Workpiece chuck with temperature control assembly having spacers between layers providing clearance for thermoelectric modules
Inventor :
Butcher, Dana G.
;
Gates, Richard B.
;
Pelrin, James
;
Hudson, Douglas E.