Method of manufacturing cmos devices by the implantation of n- and p-type cluster ions and negative ions
A Standard patent application filed on 06 June 2003 credited to Jacobson, Dale C. ; Krull, Wade A. ; Horsky, Thomas N.

Details

Application number :

2003247495  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Method of manufacturing cmos devices by the implantation of n- and p-type cluster ions and negative ions  

Inventor :

Jacobson, Dale C. ; Krull, Wade A. ; Horsky, Thomas N.  

Agent name :

 

Address for service :

 

Filing date :

06 June 2003  

Associated companies :

 

Applicant name :

SEMEQUIP, INC.  

Applicant address :

34 Sullivan Road, Unit 21, Billerica, MA 01862  

Old name :

 

Original Source :

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