Details
- Application number :
- 2003246424
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Method of manufacturing of a monolithic silicon acceleration sensor
- Inventor :
- Mahon, Geoffrey L.
- Agent name :
-
- Address for service :
-
- Filing date :
- 13 June 2003
- Associated companies :
-
- Applicant name :
- VTI TECHNOLOGIES OY
- Applicant address :
- Myllykivenkuja 6, FIN-01621 Vantaa
- Old name :
-
- Original Source :
- Go