Capacitance-type acceleration sensor and method of manufacturing the same
A Standard patent application filed on 03 July 2003 credited to Suzuki, Kazushi
;
Fukada, Naotaka
;
Fujinami, Naohiro
Details
Application number :
2003246267
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Capacitance-type acceleration sensor and method of manufacturing the same