Thin film piezoelectric oscillator, thin film piezoelectric device, and manufacturing method thereof
A Standard patent application filed on 20 June 2003 credited to Nagao, Keigo ; Yamada, Tetsuo ; Nishimura, Kosuke

Details

Application number :

2003244319  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Thin film piezoelectric oscillator, thin film piezoelectric device, and manufacturing method thereof  

Inventor :

Nagao, Keigo ; Yamada, Tetsuo ; Nishimura, Kosuke  

Agent name :

 

Address for service :

 

Filing date :

20 June 2003  

Associated companies :

 

Applicant name :

UBE INDUSTRIES, LTD.  

Applicant address :

1978-96, Oaza Kogushi, Ube-shi, Yamaguchi 755-8633  

Old name :

 

Original Source :

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