Method of cleaning substrate-processing device and substrate-processing device
A Standard patent application filed on 01 July 2003 credited to Shinriki, Hiroshi
;
Magara, Takashi
;
Suzuki, Mikio
;
Dobashi, Kazuya
Details
Application number :
2003244018
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method of cleaning substrate-processing device and substrate-processing device