Details
- Application number :
- 2003244004
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Electron beam exposure method and system therefor
- Inventor :
- Hisatsugu, Tokushige
- Agent name :
-
- Address for service :
-
- Filing date :
- 26 June 2003
- Associated companies :
-
- Applicant name :
- KABUSHIKI KAISHA PD SERVICE
- Applicant address :
- 3-1-903, Somechi, Chofu-shi, Tokyo 182-0023
- Old name :
-
- Original Source :
- Go