Method and apparatus for determining a surface quality of a substrate sample using a differential interference contrast microscope
A Standard patent application filed on 22 May 2003 credited to Fashant, Daniel R.
;
Sellin, Tracy L.
;
Savard, Thomas A.
;
Ecklund, Steven P.
Details
Application number :
2003243295
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and apparatus for determining a surface quality of a substrate sample using a differential interference contrast microscope
Inventor :
Fashant, Daniel R.
;
Sellin, Tracy L.
;
Savard, Thomas A.
;
Ecklund, Steven P.
Agent name :
Address for service :
Filing date :
22 May 2003
Associated companies :
Applicant name :
HONEYWELL INTERNATIONAL INC.
Applicant address :
101 Columbia Road, P.O Box 2245, Morristown, New Jersy 07960