Method for galvanically forming conductor structures of high-purity copper in the production of integrated circuits
A Standard patent application filed on 11 January 2000 credited to Thies, Andreas
;
Meyer, Heinrich
Details
Application number :
31435
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method for galvanically forming conductor structures of high-purity copper in the production of integrated circuits