Copper complexes and process for formation of copper-containing thin films by using the same
A Standard patent application filed on 31 January 2003 credited to Hasegawa, Chihiro
;
Kadota, Takumi
;
Watanuki, Kouhei
Details
Application number :
2003239640
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Copper complexes and process for formation of copper-containing thin films by using the same