Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions

Application number :: 2003238379
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions
Inventor :: Hainz, Joachim ; Singer, Wolfgang ; Weiss, Markus ; Wietzorrek, Joachim
Agent name :
Address for service :
Filing date :: 23 May 2003
Associated companies :
Applicant name :: CARL ZEISS SMT AG
Applicant address :: Carl-Zeiss-Stasse 22, 73447 Oberkochen
Old name :
Original Source :: Go

Optical subsystem, particularly for a projection exposure system comprising at least one optical element that can be brought into at least two positions A Standard patent application filed on 23 May 2003 credited to Hainz, Joachim ; Singer, Wolfgang ; Weiss, Markus ; Wietzorrek, Joachim