Sputter coating apparatus including ion beam source(s), and corresponding method
A Standard patent application filed on 06 May 2003 credited to Thomsen, Scott V.
;
Walton, Hugh A.
Details
Application number :
2003234484
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Sputter coating apparatus including ion beam source(s), and corresponding method