Method and device for transferring a pattern from a stamp to a substrate
A Standard patent application filed on 26 May 2003 credited to Rens, Bas J. E.
;
Janssen, Chris L. J.
;
Dona, Marinus J. J.
;
Blees, Martin H.
;
Heijmans, Teunis J. A.
;
Van Eerd, Patrick P. J.
;
Slikkerveer, Peter J.
;
Schroerders, Richard J. M.
;
Decre, Michel M. J.
Details
Application number :
2003232962
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and device for transferring a pattern from a stamp to a substrate
Inventor :
Rens, Bas J. E.
;
Janssen, Chris L. J.
;
Dona, Marinus J. J.
;
Blees, Martin H.
;
Heijmans, Teunis J. A.
;
Van Eerd, Patrick P. J.
;
Slikkerveer, Peter J.
;
Schroerders, Richard J. M.
;
Decre, Michel M. J.