Sputtering apparatus comprising a concave cathode body
A Standard patent application filed on 27 March 2003 credited to Romach, Mark ; Glocker, David A.

Details

Application number :
2003230745  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Sputtering apparatus comprising a concave cathode body  
Inventor :
Romach, Mark ; Glocker, David A.  
Agent name :
 
Address for service :
 
Filing date :
27 March 2003  
Associated companies :
 
Applicant name :
ISOFLUX, INC.  
Applicant address :
10 Vantage Point Drive, Suite 4, Rochester, NY 14624  
Old name :
 
Original Source :
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Same Inventor