Device for the low-deformation mounting of a rotationally asymmetric optical element
A Standard patent application filed on 05 April 2003 credited to Weber, Ulrich

Details

Application number :
2003229610  
Application type :
Standard  
Application status :
LAPSED  
Under opposition :
No  
Proceeding type :
 
Invention title :
Device for the low-deformation mounting of a rotationally asymmetric optical element  
Inventor :
Weber, Ulrich  
Agent name :
 
Address for service :
 
Filing date :
05 April 2003  
Associated companies :
 
Applicant name :
CARL ZEISS SMT AG  
Applicant address :
Carl-Zeiss-Strasse 22, 73447 Oberkochen  
Old name :
 
Original Source :
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Same Inventor