Method and device for the production of an antireflective coating, antireflective coating, and antireflective-coated substrate
A Standard patent application filed on 21 May 2003 credited to Steps, Jurgen
;
Walheim, Stefan
;
Holzbecher, Martin
Details
Application number :
2003229467
Application type :
Standard
Application status :
LAPSED
Under opposition :
No
Proceeding type :
Invention title :
Method and device for the production of an antireflective coating, antireflective coating, and antireflective-coated substrate
Inventor :
Steps, Jurgen
;
Walheim, Stefan
;
Holzbecher, Martin