Method and device for the plasma treatment of workpieces

Application number :: 2003229286
Application type :: Standard
Application status :: LAPSED
Under opposition :: No
Proceeding type :
Invention title :: Method and device for the plasma treatment of workpieces
Inventor :: Luttringhaus-Henkel, Andreas ; Lewin, Frank ; Arnold, Gregor ; Muller, Hartwig ; Behle, Stephan ; Vogel, Klaus ; Bicker, Matthias ; Litzenberg, Michael ; Klein, Jurgen
Agent name :
Address for service :
Filing date :: 09 May 2003
Associated companies :
Applicant name :: SIG TECHNOLOGY LTD.
Applicant address :: Laufengasse 18, CH-8212 Neuhausen Rhine Falls
Old name :
Original Source :: Go

Method and device for the plasma treatment of workpieces A Standard patent application filed on 09 May 2003 credited to Luttringhaus-Henkel, Andreas ; Lewin, Frank ; Arnold, Gregor ; Muller, Hartwig ; Behle, Stephan ; Vogel, Klaus ; Bicker, Matthias ; Litzenberg, Michael ; Klein, Jurgen