Improvement in process control for etch processes
A Standard patent application filed on 23 April 2003 credited to Heason, David ; Bodger, Michael D. ; Halbrook, Mark Burton ; Reeve, David Robert

Details

Application number :

2003228646  

Application type :

Standard  

Application status :

LAPSED  

Under opposition :

No  

Proceeding type :

 

Invention title :

Improvement in process control for etch processes  

Inventor :

Heason, David ; Bodger, Michael D. ; Halbrook, Mark Burton ; Reeve, David Robert  

Agent name :

 

Address for service :

 

Filing date :

23 April 2003  

Associated companies :

 

Applicant name :

THE BOC GROUP INC.  

Applicant address :

575 Mountain Avenue, Murray Hill, NJ 07974  

Old name :

 

Original Source :

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