Details
- Application number :
- 2003228036
- Application type :
- Standard
- Application status :
- LAPSED
- Under opposition :
- No
- Proceeding type :
-
- Invention title :
- Microporous polishing pad
- Inventor :
- Prasad, Abaneshwar
- Agent name :
-
- Address for service :
-
- Filing date :
- 21 May 2003
- Associated companies :
-
- Applicant name :
- CABOT MICROELECTRONICS CORPORATION
- Applicant address :
- 870 North Commons Drive, Aurora, IL 60504
- Old name :
-
- Original Source :
- Go
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